JPH0547763B2 - - Google Patents

Info

Publication number
JPH0547763B2
JPH0547763B2 JP12285283A JP12285283A JPH0547763B2 JP H0547763 B2 JPH0547763 B2 JP H0547763B2 JP 12285283 A JP12285283 A JP 12285283A JP 12285283 A JP12285283 A JP 12285283A JP H0547763 B2 JPH0547763 B2 JP H0547763B2
Authority
JP
Japan
Prior art keywords
measured
gap
light
photoelectric conversion
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12285283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6014106A (ja
Inventor
Yasukazu Fujimoto
Takeshi Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP12285283A priority Critical patent/JPS6014106A/ja
Publication of JPS6014106A publication Critical patent/JPS6014106A/ja
Publication of JPH0547763B2 publication Critical patent/JPH0547763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12285283A 1983-07-05 1983-07-05 寸法測定方法とその装置 Granted JPS6014106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12285283A JPS6014106A (ja) 1983-07-05 1983-07-05 寸法測定方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12285283A JPS6014106A (ja) 1983-07-05 1983-07-05 寸法測定方法とその装置

Publications (2)

Publication Number Publication Date
JPS6014106A JPS6014106A (ja) 1985-01-24
JPH0547763B2 true JPH0547763B2 (en]) 1993-07-19

Family

ID=14846232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12285283A Granted JPS6014106A (ja) 1983-07-05 1983-07-05 寸法測定方法とその装置

Country Status (1)

Country Link
JP (1) JPS6014106A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5614633B2 (ja) * 2010-07-29 2014-10-29 国立大学法人九州工業大学 回転工具と被加工物間の間隙長さ測定方法及びシステム

Also Published As

Publication number Publication date
JPS6014106A (ja) 1985-01-24

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